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WAFER LINE for 4 to 8-inch wafers
(using wafer cassette)
WAFER LINE is exclusively used for the inspection of wafers, such as SOI and laminated wafers. Full automation by using robots for conveyance, measurement and judgment is available on request. WAFER LINE has already built up actual results of continuous operations on several customers' mass-production lines, and is highly evaluated by customers.
We produce equipment with the following specifications if requested:
|4 to 12-inch wafers