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Hitachi

Hitachi Power Solutions Co.,Ltd.Scanning Acoustic Tomograph

FineSAT 7

FineSAT 7

Enhanced the function of "FineSAT Ⅲ".
FineSAT7 is the latest model that enables one-time inspection of large devices such as 300mm (12-inch) wafers using the through transmission method, in addition to improving the defect detection image quality of semiconductor devices and electronic components becoming finer and more multilayered.

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FineSAT Ⅴ

FineSAT Ⅴ

FineSAT Ⅴ is equipment with a maximum scanning speed of 2,000 mm/s and dramatically increased measurement data points.

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FineSAT Ⅲ

FineSAT Ⅲ

FineSAT Ⅲ is equipment that enables high resolution and speed-up; it works only with a single-probe and fulfills the basic functions.

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FineSAT HR

FineSAT HR

This high-grade model of FineSAT has higher resolution while retaining the other original functions.

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FineSAT Hybrid

FineSAT Hybrid

FineSAT Hybrid can provide both high-resolution single probe scanning and high-speed image-displaying electronic scanning in one unit.

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ES5100

ES5100 Series

This high throughput equipment can display real-time images using the electronic scanning system.

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FS LINE/FS LINE Hybrid

FS LINE/FS LINE Hybrid

This equipment can inspect large subjects.

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WAFER LINE

WAFER LINE

These are wafer-exclusive models that handle both single probe scanning and electronic scanning, and can also be used in a clean room.

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