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Hitachi
Provide both high-resolution single probe scanning and high-speed image-displaying electronic scanning in one unit.
Full automation by using robots for conveyance, measurement and judgment is available on request.
Succeeded in enhancing the resolution by developing a new electronic circuit to exceed such a limit of ultrasonic inspection equipment.
Use of a 64-bit processing system with improved analytical functions. Up to 25% faster measuring time.
Combination of high performance ultrasonic unit and high precision scanner. Simultaneous measurement of reflection method and through transmission method.
Electronic scan system makes high-speed measurement possible.

Scanning Acoustic Tomograph / Inspection Equipment
- Product lineup

Topics

October 15, 2026
  • We will be exhibiting at SEMICON Japan 2026 (Exhibition Zone: Advanced Packaging and Chiplet Summit), which will be held at Tokyo Big SightTrade Show: SEMICON Japan 2026 　NEW
  • Dates: December 9 to December 11, 2026
  • Venue / Booth No.: Tokyo Big Sight, West Exhibition Hall 1F, Booth W2530
  • Exhibition Product: Scanning Acoustic Tomograph FineSAT Series
  • URL：https://www.semiconjapan.org/en
November 27, 2025
  • We exhibit Scanning Acoustic Tomograph in 40th NEPCON JAPAN R&D and Manufacturing in Tokyo, Japan.
  • Trade show: 40th NEPCON JAPAN R&D and Manufacturing
  • Dates: January 21 (Wed) - 23 (Fri), 2026
  • Venue/Booth No.: Tokyo Big Sight / East Hall 7, E32-17
  • Exhibition product: FineSAT, Auto SAT
  • URL：https://www.nepconjapan.jp/tokyo/en-gb.html
August 1, 2025
  • We will exhibit our Scanning Acoustic Tomograph at MES 2025 in Osaka, Japan.
  • Trade show: MES 2025
  • Dates: September 3–5, 2025
  • Venue/Booth No.: Osaka University Nakanoshima Center / Seminar Room 6E-F, 6th Floor
  • Exhibition product: Scanning Acoustic Tomograph FineSAT Series
  • URL：https://jiep.or.jp/event/mes/mes2025/
November 25, 2024
  • We exhibit Scanning Acoustic Tomograph in 39th NEPCON JAPAN R&D and Manufacturing in Tokyo, Japan.
  • Trade show: 39th NEPCON JAPAN R&D and Manufacturing
  • Dates: January 22 (Wed) - 24 (Fri), 2025
  • Venue/Booth No.: Tokyo Big Sight / East Hall 7, E64-14
  • Exhibition product: Scanning Acoustic Tomograph FineSAT, WAFERLINE
  • URL：https://www.nepconjapan.jp/tokyo/en-gb.html
December 8, 2023
  • We exhibit Scanning Acoustic Tomograph in 38th NEPCON JAPAN R&D and Manufacturing in Tokyo, Japan.
  • Trade show: 38th NEPCON JAPAN R&D and Manufacturing
  • Dates: January 24 (Wed) - 26 (Fri), 2024
  • Venue/Booth No.: Tokyo Big Sight / East Hall 4, E29-11
  • URL：https://www.nepconjapan.jp/tokyo/en-gb.html
July 25, 2023
  • We exhibit Scanning Acoustic Tomograph in ESREF 2023 in Toulouse, France.
  • Trade show: ESREF 2023
  • Dates: October 2 – October 5 , 2023
  • Venue/Booth No.: Diagora, CONGRESS AND EXHIBITION CENTER / 4
  • URL：https://esref2023.sciencesconf.org
July 7, 2023
  • We exhibit Scanning Acoustic Tomograph in IPFA 2023 in Penang, Malaysia.
  • Trade show: IPFA 2023
  • Dates: July 24 – July 27 , 2023
  • Venue/Booth No.: Bayview Beach Resort, Penang, Malaysia / A13
  • URL：https://www.ipfa-ieee.org/2023/
June 26, 2023
  • We exhibit Scanning Acoustic Tomograph in SEMICON China 2023 in Shanghai, China.
  • Trade show: SEMICON China 2023
  • Dates: June 29 – July 1 , 2023
  • Venue/Booth No.: Shanghai New International Expo Centre / E3253
  • URL：https://www.semiconchina.org/en
August 29, 2022
July 12, 2022
  • We exhibit Scanning Acoustic Tomograph in IPFA2022 in Singapore.
  • Trade show: IPFA 2022 (The 29th International Symposium on the Physical and Failure Analysis of Integrated Circuits)
  • Dates: July 18 [Mon.] - 20 [Wed.], 2022
  • Venue/Booth Number: Marina Bay Sands Expo and Convention Centre, Level 4 Orchid-Malati Ballrooms, Singapore / A7 Booth
  • URL：https://www.ipfa-ieee.org/2022/