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Hitachi

Hitachi Power Solutions Co.,Ltd.

Electronic Scanning High-speed scanning Acoustic Tomograph / ES5100 Series

With the array probe mounted, the electronic scanning system implements measurement at a second-count speed.

Outline

The ES5100, Electronic Scanning High-speed scanning Acoustic Tomograph, incorporates an array probe, which has many linearly arranged oscillators, electronically moves the focus point to image the interiors of semiconductors, electronic parts and power modules such as IGBT at high speed.

The image display speed can be higher than that of the focus point movement system by mechanical scanning with a single probe, when the measurement pitch is the same.

ES5100

Single probe
Top: Single probe
Bottom: Image of scanning

Array probe
Top: Array probe (oscillator surface)
Bottom: Image of electronic scanning

Features

The electronic scanning system, which achieves high frequencies up to 75 MHz (nominal frequency), enables high-speed measurement by line scanning with the array probe, and images abrasion, micro void, etc. that are generated inside a device-under-test in a short period.
For example, when a device-under-test of 30 mm square is scanned at a 200 µm pitch, measurement is completed in approximately four seconds, and the planar images (hereunder, “C-scope”) in the depth direction are displayed at high speed; therefore, users can check the distribution of reflection echo intensity. The combination use of the waveform display (hereunder, “A-scope”) and the real-time sectional image (hereunder, “B-scope”) contributes to the observation of the internal status of the device-under-test.

Example of C-scope display
Example of C-scope display

Example of the combination of A-scope and B-scope displays
Example of the combination of A-scope
and B-scope displays

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